Elimination of Oxygen Defects in In-Si-O Film and Thin Film Transistor Performance
Solid State Phenomena(2021)
摘要
Effect of storage in air on silicon doped indium oxide (In-Si-O) thin-film transistors fabricated via solution processing has been investigated. The on/off ratio drastically increased from 101 just after fabrication to 105 on the 10-day storage, whereas the mobility slightly decreased from 1.4 cm2/Vs to 0.38 cm2/Vs. Time constant of aging effect was 3.6 days. The behavior suggests that oxygen defects in In-Si-O films, which may be produced during thermal evaporation of Al electrodes under high vacuum, are eliminated.
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关键词
thin film transistor performance,oxygen defects,in-si-o
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