Метод измерения периодов волноводных дифракционных оптических элементов
Письма в журнал технической физики(2021)
Abstract
An original method of the periods of waveguide diffractive optical elements (DOEs) measuring is proposed. In contrast to standard techniques, the proposed method provides measurements of waveguide gratings periods while the diffracted light is propagating in the substrate material. The method is simple and has a small error.
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Key words
волноводных дифракционных,метод измерения,элементов
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