Technique Selection for the Front End of Line Defect Localization in Bulk Si FA (2022 Update)

Greg Johnson

International Symposium for Testing and Failure AnalysisISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis（2022）

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摘要

Abstract This presentation is a pictorial guide to the selection and application of measurement methods for defect localization. The presentation covers passive voltage contrast (PVC), nanoprobing, conductive atomic force microscopy, and photon emission microscopy (PEM). It describes signal types, how the measurements are made, the sensing mechanisms involved, and the output that can be expected.

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关键词

Fabric Defect Detection,Electrical Characterization,Surface Defect Detection,Fault Localization,Laser Voltage Probing

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