Structural and optical properties of TiO2 single layer and Bi-layered Ag/TiO2 prepared by DC/RF magnetron sputtering

Currently optical coating of Ag/TiO2 can be found in a variety of daily and industrial applications. In this work, an attempt to prepare of thin layer TiO2 as single layer and two alternating layers Ag/TiO2 on glass substrates using DC/RF magnetron sputtering technique under different values of the sputtering power (75-150) W. The sputtering power influence on the structural and the optical properties of Ag/TiO2 films was investigated by X-ray diffraction (XRD) and UV–visible spectrophotometery. The results show that the pure TiO2 and Ag/TiO2 thin layers have a polycrystalline structure of the TiO2 anatase type. Then, for realizing its potential as smart coating, the optical characterization was accomplished on a bi-layers structure. Result shows the maximum transmittance 84 % over the Vis-NIR spectral region.