Stacked-actuator deformable mirror with rigid design made of piezoceramic

Expanding adaptive element base is an important task in scientific and industrial areas, where distorted wavefront should be corrected. This problem can be solved by creating new types of wavefront correctors (mainly deformable mirrors) and modernizing existing ones. Considering deformable mirror (DM) as a key element of any adaptive optical system (AOS), one should focus on the main parameters of DM that determine effectiveness of correction: the stroke of the mirror, aperture, the first resonant frequency, the number of control elements. In the article new design of stacked-actuator deformable mirror (SADM) is presented. In contrast to the assembly of conventional SADM, such DMs are manufactured from piezoceramic combs, that allows to decrease number of technological steps, increase spatial resolution of the mirror and thereby reduce the cost of final product.