三维激光多普勒测振仪研究
Electronics World(2021)
Abstract
激光测振仪具有非接触测量,时间与空间分辨率高等优点,广泛应用于微机电系统(MEMS)、机床、汽车等行业振动测量.本文综述了三维激光多普勒测振仪国内外研究成果及应用,简要分析其存在的问题及发展趋势.
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