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Low-cost, Open-Source XYZ Nanopositioner for High-Precision Analytical Applications

Hsien-Shun Liao,Christian Werner,Roman Slipets,Peter Emil Larsen,Ing-Shouh Hwang,Tien-Jen Chang,Hans Ulrich Danzebrink,Kuang-Yuh Huang,En-Te Hwu

HardwareX（2022）

Cited 13|Views17
Key words
Nanopositioning,3D printing,Atomic resolution,Vibrometer,Atomic force microscopy,Scanning electron microscopy
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