Research on the High Sensitivity Detection Method of Carbon Nanotube/Polydimethylsiloxane Composites Structure

MICROMACHINES(2022)

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摘要
In this paper, a carbon nanotube (CNT)/polydimethylsiloxane (PDMS) composite force-sensitive structure with good flexibility is proposed and fabricated, and the measurement of scanning electron microscopy (SEM) and Raman are carried out. The equivalent circuit of force-sensitive test of structure is performed and analyzed under direct current (DC) and alternating current (AC) conditions. Under AC conditions, experimental results further show that the sensitivity and sensitivity factors of force-sensitive structures are 0.15 KPa-1 and 2.17 in the pressure range of 600-1000 KPa compressive stress and 20-50% tensile stress, respectively. These results are increased by 36.4% and 38.2% compared to the results of compressive stress (0.11 KPa-1) and tensile stress (1.57) under DC conditions, respectively. It shows that the carbon nanotube/PDMS composite has higher test accuracy under AC conditions.
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关键词
carbon nanotube, polydimethylsiloxane (CNT, PDMS), force-sensitive test, high sensitivity
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