Heterogeneous Integration of Uni-Travelling-Carrier Photodiodes using Micro-Transfer-Printing on a Silicon-Nitride Platform
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC)（2021）
关键词
optical power,SiN waveguides,waveguide UTC,low-loss waveguides,SiN-platform,high speed detectors,silicon nitride photonic platform,waveguide photodiodes circumvents this limitation,high-speed photodiodes,silicon-nitride platform,microtransfer-printing,uni-travelling-carrier photodiodes,heterogeneous integration,SiN
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