Optical Coherence Microscopy for Integrated Photonics Devices Imaging

Maxim A. Sirotin,Maria N. Romodina,Evgeny Lyubin,Irina Soboleva,Vitalina V. Vigdorchik,Kirill R. Safronov,Daniil Akhremenkov,Vladimir O. Bessonov,Andrey A. Fedyanin

2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC)（2021）

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摘要

Optical coherence microscopy (OCM) is a method of three-dimensional visualization of micro-objects based on a combination of optical coherence tomography (OCT) and confocal microscopy [1] . OCM allows three-dimensional mapping of the refractive index of the sample and has a submicron resolution [2] . In addition, one of the methods, phase-sensitive OCM, has subnanometer axial sensitivity to changes in optical path-length [3] . The submicron resolution of the OCM makes it a powerful tool for studying semitransparent objects.

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关键词

confocal microscopy,three-dimensional mapping,submicron resolution,phase-sensitive OCM,optical path-length,optical coherence microscopy,integrated photonics devices,three-dimensional visualization

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