Design and fabrication of the broad angular spectrum dichroic mirror

The dichroic mirror is broadly used in the broad-field multi-object spectrometer, which is the key component to separate incident light into several wavelength channels. The design and fabrication of the broad angular spectrum dichroic mirror is investigated in this paper. The global optimization is applied to obtain the low passband ripple and the sharp transition between the transmissive and reflective wavelength range. The dichroic mirror was prepared by ion beam sputtering deposition. The results showed the average reflectance was larger than 99% between 310nm and 550nm and the transmittance (single side, mean-polarization) was larger than 98% between 570nm and 1000nm with the angle of incidence 28 degrees +/- 5 degrees. The film thickness distribution and film sensitivity of the dichroic film were also analyzed. This research relieves the feasibility of the design and fabrication of the broad angular spectrum dichroic mirror by ion beam sputtering deposition process.