A NEW MINIATURE MAGNETOMETER BASED ON A QUARTZ MEMS RESONATOR AND A STACK OF MAGNETIC MATERIALS
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)（2022）
Abstract
This paper presents an innovative 1D MEMS resonating magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials. It is targeted for applications such as magneto-inertial navigation. The sensor was successfully fabricated using a wet chemical process and its working principle was proven correct. The experimental results showed a sensitivity of 1500 Hz/T and an estimated resolution of 7.3 nT.
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Key words
Magnetometer, MEMS, quartz, DETF, exchange bias
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