OBSERVATION OF HIGH TEMPERATURE COEFFICIENT OF FREQUENCY (TCF) IN BISMUTH OXYIODIDE (BIOI) VIBRATING NANOMECHANICAL RESONATORS

Song Wu,Fei Xiao,Jiankai Zhu,Yachun Liang,Chenyin Jiao,Shenghai Pei,Zenghui Wang

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)（2022）

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摘要

We have studied temperature coefficient of frequency (TCf) in BiOI nanomechanical resonators, for electrically driven resonances with temperature from 303 to 324 K. The device shows very high TCf values (7x10(4) ppm/K) at close to room temperature. Our results suggest that BiOI nanomechanical resonators can be explored towards highly-sensitive resonant temperature sensors.

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关键词

TCf, BiOI, Nanomechanical Resonators, Highly-Sensitive, Temperature Sensors

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