SOI-based Opto-Mechanical Terahertz Bolometer Operating at Room Temperature with Microsecond Response Time
2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz)（2021）
关键词
SOI-based optomechanical terahertz bolometer,induced CL deflection readout,low mechanical quality factor,antenna peak absorption,fundamental bending mode,coupled aluminum half-dipole antennas,cantilever,bimaterial effect,terahertz detector,microsecond response time,frequency 2.5 THz,wavelength 1.5 mum,temperature 300.0 K,temperature 293.0 K to 298.0 K,frequency 3.8 THz,Si
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