Characterization of nanoporous alumina using terahertz reflectometry and scattering imaging

Min Zhai,A. Locquet,Mi Jung,Deokha Woo,D. S. Citrin

2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ)（2021）

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摘要

The structure and morphology of nanoporous alumina (NP Al2O3) films on Al substrates are investigated by terahertz (THz) reflectometry and scattering imaging. One inhomogeneous area is identified in THz C-scan results off specular conditions at various angles. The thickness of NP Al2O3 films calculated based on THz results is in excellent agreement with destructive cross-sectional field emission scanning electron microscopy (FE-SEM) measurements.

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关键词

terahertz reflectometry,scattering imaging,morphology,inhomogeneous area,THz C-scan,destructive cross-sectional field emission scanning electron microscopy,FESEM,nanoporous alumina films,Al substrates,Al2O3,Al

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