SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO 3 /SiC Bonded Wafers

Junyao Shen,Sulei Fu,Rongxuan Su,Huiping Xu,Zengtian Lu,Qiaozhen Zhang,Fei Zeng,Cheng Song,Weibiao Wang,Feng Pan

Journal of Microelectromechanical Systems（2022）

引用 9|浏览24

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摘要

The development of 5G has put forward a higher demand for filters, and the purpose of this work is fabricating surface acoustic wave (SAW) filters with excellent temperature stability and high power handling using LiTaO3/SiC bonded wafers. SAW resonators with different wavelengths are fabricated on LiTaO3/SiC, and LiTaO3/Si, bulk LiTaO3 as well. We evalu...

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关键词

Silicon carbide,Resonators,Silicon,Substrates,Surface acoustic waves,Thermal stability,5G mobile communication

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