Coupled micromechanical resonator for mass detection

A resonator composed of two coupled doubly-clamped beams is fabricated and used as a mass sensor. Five mass blocks made of IP-L780 photoresist are printed on each resonator beam by 3D microprinting technology as mass loading. The minimum mass which the sensor can detect is as low as 10 ng. The experimental results show that the asymmetric resonant mode of this resonator has a higher Q factor than the symmetric mode when doing mass detection. The responsivity of the coupled resonator for the mass sensing reaches 58.5 Hz/ng.