Cross-coupling control method of the two-axis linear motor based on second-order terminal sliding mode

When the dual-axis linear motor is processing components, its accuracy will be affected by the uncertainty and nonlinearity of the system, and the complexity of the processing curve trajectory. The goal is to improve the machining accuracy and response speed of the XY dual-axis permanent magnet synchronous linear motor two-dimensional platform, improve the anti-interference ability, and reduce the contour error. This paper proposes a coupled control method based on dual closed-loop single-axis high-order terminal sliding mode position control (TSMC). First, an improved mathematical model of equivalent contour error is established. Combine the coordinated controller to get the coupling link. Then, to accelerate error convergence and suppress chattering, a high-order terminal sliding mode controller is designed. The single-axis current controller is designed using high-order sliding mode algorithms. Simulations and experiments show the effectiveness and feasibility of the proposed method.