Mems gas jet flow gyrometer - a numerical approach

A micro-machined gas jet flow gyroscope is an inertial sensor mainly attractive because of its mechanical proof-mass lack. This work reports the simulation of a gas jet flow gyroscope as a function of different parameters. It focuses on understanding the gas behaviour inside the cavity and defining guidelines toward an improved design by discussing detector positions and sensitivity. It appears that a compromise between sensitivity and measurement range has to be made to define the best detector position. We observe that the cavity zones which make a gyrometric measurement possible are relatively restricted due to the flow gas stream in the cavity.