Mems gas jet flow gyrometer - a numerical approach
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)(2021)
摘要
A micro-machined gas jet flow gyroscope is an inertial sensor mainly attractive because of its mechanical proof-mass lack. This work reports the simulation of a gas jet flow gyroscope as a function of different parameters. It focuses on understanding the gas behaviour inside the cavity and defining guidelines toward an improved design by discussing detector positions and sensitivity. It appears that a compromise between sensitivity and measurement range has to be made to define the best detector position. We observe that the cavity zones which make a gyrometric measurement possible are relatively restricted due to the flow gas stream in the cavity.
更多查看译文
关键词
Micro Machined Fluid Inertial Sensor,Gyrometer,Jet Flow,High Measurement Range,CFD Simulation,Velocity measurement
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要