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A UV to NIR Si Wavelength Sensor With Simple Geometry and Good Resolution

Can Fu, Chuan Lu,Hai-Yang Cheng,Xiang Zhang,Zhi-Xiang Zhang,Yu-Tian Xiao,Di-Hua Lin,Jiang Wang,Ji-Gang Hu,Zhi-Li Wang,Di Wu,Lin-Bao Luo

IEEE Transactions on Electron Devices（2022）

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Abstract
In this work, a wavelength sensor that is capable of quantitatively distinguishing the wavelength in the range of ultraviolet (UV) to near-infrared (NIR) light (265–1050 nm) is presented. The wavelength sensor is fabricated by depositing two parallel Au electrodes on the two sides of a $200 ~\mu \text{m}$ Si wafer. It is foun...
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Key words
Silicon,Photoconductivity,Photodetectors,Electrodes,Photonics,Substrates,Surface waves
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