Role of micro-nano fabrication process on the temperature coefficient of resistance of platinum thin films resistance temperature detector

Weiming Lv,Yiqun Wang,Wenhua Shi,Wei Cheng,Rong Huang,Ruifang Zhong,Zhongming Zeng,Yaming Fan,Baoshun Zhang

Materials Letters（2022）

引用 9|浏览10

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摘要

•Platinum thin films temperature detector prepared by micro-nano fabrication process.•Integrating chemical polishing and annealing process to improve device performance.•A high temperature coefficient of resistance value of 3439 ppm/°C was obtained.

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关键词

Thin films,Sensors,Annealing,Chemical mechanical polishing,Temperature coefficient of resistance

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