Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

Clamping loss in micromechanical resonators can strongly depend on the boundary conditions far away from the actual vibrating structure because the acoustic wavelength greatly exceeds the device dimensions. We demonstrate a scheme for post-fabrication tuning of the clamping loss in flexural-mode and bulk-mode resonators by modifying the boundary conditions of the chip with the frame. The measured ...