Electrical resistivity evolution in electrodeposited Ru and Ru-Co nanowires

Jun Hwan Moon,Seunghyun Kim,Taesoon Kim,Yoo Sang Jeon,Yanghee Kim,Jae-Pyoung Ahn,Young Keun Kim

Journal of Materials Science & Technology（2022）

引用 4|浏览9

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摘要

•Propose a strategy to reduce electrical resistivity and complexity of current interconnect structure in ICs.•Emulate a semiconductor metallization environment employing porous nano-templates.•Design nanoscale Ru and Ru-Co structures by electrodeposition.•Uncover electrical properties of Ru-based nanowires and microstructural evolution.

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关键词

Ruthenium (Ru),Ruthenium-cobalt (Ru-Co),Nanowire,Electrical resistivity,Microstructure,Electrodeposition

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