The thermo-optical and optical properties of thin ZnO and AZO films produced using the atomic layer deposition technology
Journal of Alloys and Compounds（2022）
Abstract
•The ZnO and AZO layers show thermal stability after the second heating cycle.•Negative thermo-optical coefficient for ZnO layer and positive for AZO layer.•The columnar structure causes a slight optical anisotropy.•Strong volumetric expansion affects on negative TOC value for the ZnO layer.
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Key words
ALD deposition,Thin dielectric films,Optical and thermo-optical properties,Ellipsometry
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