Modified residual gas analyzer for measuring the ion mass-to-charge composition of a repetitively pulsed plasma
AIP ADVANCES(2022)
Abstract
We describe the use of a modified residual gas analyzer based on a quadrupole mass spectrometer to measure the ion mass-to-charge composition of the plasma of a repetitively pulsed planar magnetron discharge. The pulse duration and frequency parameters necessary to ensure reliable plasma ion composition data are determined. Examples of measurements of the ion mass-to-charge spectra are given. (c) 2022 Author(s).
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Key words
modified residual gas analyzer,plasma,ion,mass-to-charge
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