The Demonstration of High-Quality Carbon Nanotubes as Through-Silicon Vias (TSVs) for Three-Dimensional Connection Stacking and Power-Via Technology
IEEE TRANSACTIONS ON ELECTRON DEVICES(2022)
摘要
With the usage of gas ferrocene Fe(C-5;H-5)(2); as a reactant, which is different from the traditional thin Fe film, to grow the high-quality carbon nanotubes (CNTs) in the high aspect ratio (AR) trench structure, it has many advantages to be the through-silicon vias (TSVs) material for the three-dimensional (3-D) stacking technology. In this work, we successfully demonstrate the full process flow, including CNT growing, chemical-mechanical planarization (CMP), and wafer temporary bonding for CNTs as TSVs in the 3-D stacking connection. The flexibility for this demonstrated process flow makes the integration of real high dense devices and CNTs as TSVs for the 3-D connection more easily.
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关键词
Through-silicon vias, Stacking, Silicon, Bonding, Iron, Conductivity, Carbon nanotubes, 3-D stacking technology, carbon nanotubes (CNTs), ferrocene Fe(C₅, H₅, )₂, through-silicon vias (TSVs)
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