Pulsed laser deposition of multilayer diamond-like carbon film grown on stainless steel

DIAMOND AND RELATED MATERIALS(2021)

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摘要
The amorphous SiC layers played an essential role of improving adhesive property in the pulsed laser depositiongrown multilayer DLC coating. Comparison of several experiments exhibited that the adhesive SiC layer enhanced the adhesive strength of the DLC layer on the transitional Ti layer. Meanwhile, the 'inserted' buffer thin SiC layers, which had strong binding force with the DLC layers, divided the thick DLC layer (about 1.2 mu m) into several relatively thin layers. It's thought that the buffer SiC layers reduced accumulation of internal stress in each finite thickness and then prevented the cracking of the DLC layer. And the total thickness of optimized multilayer DLC coating reached to 2 mu m. The multilayer DLC coating with the adhesive SiC layer and buffer SiC layers showed an excellent adhesive performance on the stainless steel. The similar tribological property of SiC layer to the DLC layer conferred this multilayer DLC coating a low friction coefficient and a low wear rate.
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关键词
Pulsed laser deposition, Multilayer diamond-like carbon coating, Silicon carbide, Tribological property
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