Recent Advances in Field-Controlled Micro-Nano Manipulations and Micro-Nano Robots

Field-controlled micro-nano manipulations and micro-nano robots have attracted increasing attention in the fields of medicine, environment, engineering, and energy due to their outstanding characteristics which include small size, strong controllability, cluster action, and strong penetrability; thus, they have gradually become an important research focus in micro-nano manufacturing and in vivo detection. However, precise cluster control, targeted drug delivery in vivo, and cellular micro-nano operation remain challenges. Herein, the scientific research results produced in recent years to meet these challenges are studied. Considering the current research enthusiasm and application challenges, the micro-nano manipulations and micro-nano robots driven by physical fields (magnetic field, sound field, and light field) are mainly discussed. This review includes detailed analysis of control mechanism, control objectives, and supporting technologies; analysis of recent research results, and advantages and future development trends driven by physic fields, etc. This review involves the crossover and integration of multiple disciplines (including microelectronic technology, micro-nano processing technology, biology, physics, chemistry, machinery, and automation, etc.), hoping to inspire relevant practitioners to create new research perspectives, and promote the development of micro-nano robotics.