Improvement in laser-based micro-processing of carbon nanotube film devices

APPLIED PHYSICS EXPRESS(2022)

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摘要
Carbon nanotubes (CNTs) are considered remarkable low-dimensional materials that can overcome the problems associated with bulk semiconductors. The development of CNT processing technology complementing conventional processing technology is required to advance research on CNT devices. We assessed the potential and application of laser-based micro-processing for patterning micrometre-thick CNT films. We discovered that the laser ablation method can pattern micrometre-thick CNT films in micrometre spatial resolution and can directly pattern the CNT films inside the protective film-features not achievable by competing processing technologies. Thus, the laser ablation method is uniquely advantageous and applicable in manufacturing functional CNT devices.
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关键词
carbon nanotube, laser ablation, flexible device, motion sensor
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