Classifying and explaining defects with small data for the semiconductor industry

semanticscholar(2022)

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摘要
In this work, we present an automatic classifier of wafer defects for the semiconductor industry. Hopefully defects are rare, but this puts the classifying problem in a small data context. We propose a fast and fully reproducible approach based on decision trees. The main interest of using decision trees lies in obtaining a highly explicable classifier, which makes the origin of the defect easy to identify.
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关键词
defects,semiconductor industry,small data
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