Porous silicon gas permeable membranes

V. V. Bolotov, I. V. Ponomareva,K. E. Ivlev, E. V. Knyazev,D. V. Sokolov

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE “PHYSICAL MESOMECHANICS. MATERIALS WITH MULTILEVEL HIERARCHICAL STRUCTURE AND INTELLIGENT MANUFACTURING TECHNOLOGY”（2022）

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摘要

In this paper, the features of the formation of filtering layers based on channel silicon with channel sizes of 150–400 nm, obtained in electrolytes with the addition of oxidants, are considered. Porous silicon membranes were prepared on these layers. The gas transmission of nitrogen dioxide was investigated. A correlation was observed between channel diameter and sensing response.

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porous silicon gas

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