An Extremely High-Speed and Low-Power Digital Pixel Sensor with Advanced Sensor Architecture

- This paper presents an extremely high-speed of 1200 fps global-shutter (GS) CMOS image sensor (CIS). A GS CIS is a great alternative to solve image distortion issues caused by a conventional rolling-shutter (RS) CIS operation, since a 2-dimensional image data can be simultaneously sampled by the in-pixel analog memory. In order to achieve a high speed global-shutter operation, we proposed a novel architecture, using a pixel-wise ADC and an in-pixel digital memory, for the digital pixel sensor (DPS) which is a remarkable global-shutter operation CIS. Within 4.95- μ m, one ADC and 22-bit memories are integrated by using two small-pitch Cu-to-Cu interconnectors for the wafer-level stacking. The 2-mega pixels (Mp) array, 1668H×1364V, prototype image sensor is successfully fabricated and demonstrated.