Molecular Dynamic Simulation of the Effects of Glancing-Angle Scatterings on the Formation of High Aspect Ratio Features
2020 IEEE International Conference on Plasma Science (ICOPS)（2020）
Key words
incident ions energy,etch process,feature-level simulation efforts,HAR features,molecular dynamic simulation,glancing-angle scattering,high aspect ratio features,plasma etching,modelling ions,etching effects,incidence greater than 80 degrees,glancing-angle events,incident energies,scattering event,effective distribution
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