Role of Substrate and Annealing on Microstructural, Optoelectronic and Luminescence Properties of RF Magnetron Sputtered AZO Thin Films in Confocal Configuration
Journal of Luminescence（2022）
关键词
AZO thin Films,Confocal sputtering,Substrate type,Annealing,Microstructure,Optoelectronic properties
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