New RC-Imbalance Failure Mechanism of Well Charging Damage and The Implemented Rule

Yu-Lin Chu, Hsi-Yu Kuo,Hung-Da Dai,Kuan-Hung Chen,Pei-Jung Lin, Chun-Ting Liao, Ta-Chun Lin, Ming Feng, Swercy Chiu,Victor Liang

2022 IEEE International Reliability Physics Symposium (IRPS)（2022）

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摘要

In this paper, a new failure model that explains the plasma-induced damage (PID) involving two wells is described. Contrary to common explanation that the larger wells discharge and damage devices in smaller wells, we propose that the damage is caused by an imbalance of the "RC" associated with each "well system". The victim gate can reside in either the large or small well. This RC imbalance mode...

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关键词

Geometry,Failure analysis,Logic gates,Reliability engineering,Discharges (electric),Physics

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