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Nanoscale Multiply Charged Focused Ion Beam Platform for Surface Modification, Implantation, and Analysis.

Mathieu Lalande, Pierre Salou,Arnaud Houel, Thierry Been, Thierry Birou, Charles Bourin,Amine Cassimi,Arthur Keizer,Jean-Baptiste Mellier,Jean-Marc Ramillon, Anthony Sineau,Anne Delobbe, Stephane Guillous

Review of scientific instruments online/Review of scientific instruments（2022）

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