Tailoring sheet resistance through laser fluence and study of the critical impact of a V-shaped plasma plume on the properties of PLD-deposited DLC films for micro-pattern gaseous detector applications

Maura Cesaria,Antonio Serra,Daniela Manno,Muhammad Rizwan Aziz,Simona Rella,Cosimino Malitesta,Maurizio Martino,Piet Verwilligen,Anna Paola Caricato

Diamond and Related Materials（2022）

Cited 2|Views27

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Abstract

Diamond-like carbon (DLC) is an attractive inexpensive alternative to diamond. The control of the C (sp3)/C(sp2) ratio, influencing the material properties, is fundamental for its use in dedicated applications like, for example, the fabrication of a particular class of gas detectors for ionizing particles termed Micro-Pattern Gaseous Detectors (MPGDs).

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Key words

Pulsed laser deposition,Diamond-like carbon films,V-shaped plume,OFF-axis configuration,Tuned C(sp3) distribution,Gas detector field

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