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Membrane-free fiber-optic Fabry-Perot gas pressure sensor with Pa-level resolution

Xiaoli Zhang,Xinlei Zhou,Yewei Chen,Pengcheng Tao,Fengxiang Ma,Qingxu Yu,Wei Peng

Optics & Laser Technology（2022）

Cited 4|Views13
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Abstract
•A membrane-free fiber-optic sensor for gas pressure detection is presented.•A femtosecond laser is employed to fabricate the sensor.•A sensitivity of 7702 nm/MPa and a resolution of 4.9 Pa has been demonstrated.•The temperature influence is eliminated by using an FBG sensor.
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Key words
Membrane-free pressure sensor,Optical fiber sensing,Fabry-Perot interferometer,High resolution
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