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Influence of Substrate Temperature on Structure and Properties of Nb-Doped Β-Ga2o3 Films

Li, Ruidong,Deng, Jinxiang,Kong, Le,Meng, Junhua,Luo, Juxin,Zhang, Qing,Gao, Hongli,Yang, Qianqian,Wang, Guisheng,Wang, Xiaolei

Journal of electronic materials（2022）

Cited 5|Views23
Key words
Nb-doped β-Ga2O3 film,substrate temperature,morphology and roughness,optical properties,electrical characteristics
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