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Development of Directional MEMS Microphone Single Module for High Directivity and SNR

Ilseon Yoo,Hyunsoo Kim,Sanghyeok Yang,Donggu Kim,Dae-Sung Kwon,Janghyeon Lee,Taeho Jeong

IEEE Sensors Journal（2022）

Cited 2|Views10
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Abstract
A unidirectional microelectromechanical system (MEMS) microphone single module for handsfree and voice recognition systems in automobiles is presented. Because in-cabin noise and temperature variation affect the reduction in the handsfree and voice recognition system performance, noise suppression and increasing the signal-to-noise ratio (SNR) of the microphone are required. In this study, a capac...
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Key words
Microphones,Micromechanical devices,Optical filters,Acoustics,Signal to noise ratio,Silicon,Resistance
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