Selective epitaxial growth of in situ doped SiGe on bulk Ge substrates forp+/n junction formationK Garidis,A Abedin, A Asadollahi, PE Hellström,M Östlinguser-5e9d449e4c775e765d44d7c9(2020)引用 0|浏览11暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要