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Defect Engineering of Silicon with Ion Pulses from Laser Acceleration

Walid Redjem,Ariel J. Amsellem,Frances I. Allen,Gabriele Benndorf,Jianhui Bin,Stepan Bulanov,Eric Esarey,Leonard C. Feldman, Javier Ferrer Fernandez,Javier Garcia Lopez,Laura Geulig,Cameron R. Geddes,Hussein Hijazi,Qing Ji,Vsevolod Ivanov,Boubacar Kanté,Anthony Gonsalves,Jan Meijer,Kei Nakamura,Arun Persaud,Ian Pong,Lieselotte Obst-Huebl,Peter A. Seidl,Jacopo Simoni,Carl Schroeder,Sven Steinke,Liang Z. Tan,Ralf Wunderlich,Brian Wynne,Thomas Schenkel

COMMUNICATIONS MATERIALS（2023）

Cited 6|Views71
Key words
Applied physics,Design,synthesis and processing,Electronic structure,Materials for devices,Materials Science,general
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