Composite complex agent based on organic amine alkali for BTA removal in post CMP cleaning of copper interconnection

Liu Yang,Da Yin,Baimei Tan,Wenqian Zhang,Tiecheng Han,Peng Zhao,Tongju Wang, Yawen Liu

Journal of Electroanalytical Chemistry（2022）

引用 6|浏览3

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摘要

The combination of FA/OII chelating agent and double complexing agent ammonium citrate can shift the ionization to the right (the dissolution of Cu-BTA), effectively break the Cu-N bond, and accelerate BTA removal on the copper surface.

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关键词

Post CMP cleaning,Alkaline cleaning solution,BTA removal,DFT

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