Development of Laser-Micromachined 4H-SiC MEMS Piezoresistive Pressure Sensors for Corrosive Environments
IEEE Transactions on Electron Devices（2022）
Abstract
Making full use of the availability and excellent performance of silicon carbide (SiC) substrates, SiC-based MEMS piezoresistive pressure sensors have been extensively investigated. In this article, a femtosecond laser was adopted instead of dry plasma etching technology to realize mass fabrication of 128 bulk SiC piezoresistive pressure sensor diaphragms from half a 4H-SiC wafer. These diaphragms...
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Key words
Silicon carbide,Pressure sensors,Etching,Temperature sensors,Lasers,Plasma temperature,Piezoresistance
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