1024 3D-Stacked Monolithic NEMS Array with 375μm 2 0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing

NanoElectroMechanical System (NEMS)-based resonator sensors are a promising approach to detect a single molecule deposition with zeptogram mass resolution [1]. However, MEMS sensing areas (on the order of 1 $\mu\mathrm{m}^{2}$) are several orders of magnitude lower than the mass deposition focus beam ($\text{mm}^{2}$ -scale), dramatically reducing the probability of detecting...