Deterministic Shallow Dopant Implantation in Silicon with Detection Confidence Upper‐Bound to 99.85% by Ion–Solid Interactions (adv. Mater. 3/2022)Alexander M. Jakob,Simon G. Robson,Vivien Schmitt,Vincent Mourik,Matthias Posselt,Daniel Spemann,Brett C. Johnson,Hannes R. Firgau,Edwin Mayes,Jeffrey C. McCallum,Andrea Morello,David N. JamiesonAdvanced Materials（2022）引用 2|浏览18AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
