Method of Diamond-Like Coatings Obtaining

The article is devoted to the method of obtaining a diamond-like coating on a silicon substrate by laser ablation of a glassy carbon target in a vacuum. The presented technology makes it possible to achieve the synthesis of wear-resistant thin-film coatings with a thickness of about 200 nm. The diagnostics of the obtained coating was carried out using probe microscopy, the chemical and phase composition was estimated by the Raman spectra.