Optimization strategy for high-quality laser milling of silicon
Optics & Laser Technology（2022）
Abstract
•Roughness of laser milled silicon is controlled by spot overlapping and fluence.•Optimal ratio of spot centers interspace to spot radius is below 0.3.•Optimal fluence of 1 J/cm2 should be achieved preferably by laser spot enlargement.
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Key words
Silicon,Laser milling,Optimization,Roughness,Productivity
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