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<title>Metal insulator semiconductor structure single crystal silicon liquid crystal light valve</title>

JiaoBo Gao,Ke-fei Ye, Yue-you Feng

Display Devices and SystemsSPIE Proceedings(1996)

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Abstract
Detailed description of the structure, operation, fabrication, and performance of a fast-response metal- insulator-semiconductor structure single crystal silicon liquid crystal light valve (MIS-Si-LCLV) is given. A 45 degree(s) twisted nematic liquid crystal configuration has been utilized. A MIS-Si-LCLV is demonstrated with a limiting resolution of 40 lp/mm over a 45 mm aperture and contrast ratios of > 50:1, input light sensitivities at (lambda) equals 930 nm ((Delta) (lambda) equals 40 nm) of better than 30 (mu) W/cm2 and response times as fast as 20 ms have been measured.
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<title>metal insulator semiconductor structure,silicon
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