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Irreversible optical properties of AgOx mask layer with temperature for super-resolution near-field structure application investigated by in situ, ex situ ellipsometry

Xuezhe Li,Sang Jun Kim,Sung Hyuck An,Sang Youl Kim

Japanese Journal of Applied Physics（2004）

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Abstract
The optical properties of AgOx thin films used as mask layers for a super-resolution near-field structure (super-RENS) were determined by in situ and ex situ ellipsometries and UV/VIS spectrometry. Irreversible changes of optical properties of AgOx thin films with temperature were also investigated.
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Key words
agoxmask layer,optical properties,super-resolution,near-field
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